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MEMS and NEMS Characterization and Motion Laboratory


The MEMS and NEMS characterization and motion lab conducts fundamental and applied research in the areas of MEMS/NEMS dynamics and statics including both linear and nonlinear aspects. Research involves designing, modeling, simulating, characterizing, and testing a vast variety of MEMS and NEMS devices and applications.

Applied research is conducted, aiming to solve industry-related problems, such as investigating the failure and collapse of microstructures due to mechanical shock, capillary forces, and electrostatic forces. Fundamental research is also performed, aiming to understand basic phenomena and concepts related to the dynamics of structures at the Micro and Nano scale, such as investigating the nonlinear vibration response of carbon nanotubes (CNTs).

Other research activities include designing novel MEMS/NEMS sensors and switches, such as developing a threshold switch triggered by mechanical shock, a capacitive switch that operates at reduced voltage, and smart bio- and chemo–mechanical sensors. Our research encompasses modeling micro- and nano-devices and structures under coupled multi-physics (mechanical, electrostatic, squeeze-film, and thermoelastic) forces, developing reduced-order models and computationally efficient approaches to tackle the coupled multi-physics and nonlinear problems, and analyzing micro- and nano-scale phenomena.

Binghamton University State University of New York
PO BOX 6000 Binghamton, NY 13902-6000

Last Updated: 11/5/12