The MEMS and NEMS Characterization and Motion Laboratory hosts and has access to variety of experimental equipments and devices that enable the characterization of micro- and nano-scale structures and devices. These include MEMS vibration and topology measurement system: Polytec MSA-400 Micro System Analyzer, Ultra-high frequency UHF120 (up to 1.2 GHz) laser Doppler vibrometer, Wyko Profilometers, SEM, AFM, Nanoindenter, laser vibrometers, shakers and shaker tables with controllers, custom-made vacuum-chamber-pressure systems for measuring squeeze-film damping effects in MEMS, drop tables, and labVIEW and Siglab DSP data acquisition systems. The laboratory also contains the state-of-the-art computational capabilities, such as the multi-physics finite-element software ANSYS, COMSOL, MATLAB, MATHMATICA, and FORTRAN, beside assortment of high-speed computers and workstations.
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Last Updated: 11/5/12
